FIB-SEM - Zeiss Auriga 40 CrossBeam (Irchel)

The focused ion beam-scanning electron microscope (FIB-SEM) Auriga 40 is a multi-approach instrument to investigate sample volume at nanoscale resolution. The ATLAS 3D package, especially dedicated for nanotomography, allows generation of 3D stacks up to 32 k x 32 k pixels.   

University Zurich, Irchel Campus, Room Y42-F-70. 

Follow this link to apply for an introduction to the microscope.

Electron and ion columns

Gemini Zeiss column with resolution of 1 nm at 15 kV and 1.9 nm at 1 kV. Magnification range: 12 x -1000 kx. Probe current 4 pA - 20 nA. Acceleration voltage: 0.1 - 30 kV. Emitter: Schottky field emitter.

Cobra Zeiss column with resolution of less than 2.5 nm at 30 kV. Magnification range: 300 x -500 kx. Probe current 1 pA - 50 nA. Acceleration voltage: 1 - 30 kV. Emitter: Ga liquid metal ion source.

Detector Systems

In-lens: high efficiency annular type SE detector

Chamber: Everhart-Thornley type SE detector

In-lens: EsB detector with filtering grid for BSE detection, filtering voltage 0 -15000 V

STEM detector for TEM like imaging

Accessories

Single needle GIS (Pt)

Stage: 6-axissuper eucentric, all motorized stage

Airlock  system for fast and efficent sample transfer

Leica VCT cryo transfer system and cryo stage for milling and imaging at temperature down to - 160°C including preparation device Leica BAF060 for freeze-fracturing and coating.

System controls

Integrated SmartSEM user interface for standard applications

Nanopatterning and Visualization engine (NPVE) package allows beam control and large field of view imaging

Literature and Links

Knott et al., 2011 Focussed ion beam milling and scanning electron microscopy of brain tissue

Responsible Persons

If you have questions about the device please contact the responsible person.

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